Beijing Super Q Technology Co.,ltd
Beijing Super Q Technology Co.,ltd

Haidian, Beijing, China

Response Time: < 24h

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Home > Products > Vacuum Pump > Turbo Molecular Pump

Oil lubrication Turbo Pump

  • Min. Order:1 Piece(s)
  • Date of Delivery:7 days
  • Payment Type:L/C, T/T, Western Union
  • Port:TIANJIN
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Beijing Super Q Technology Co.,ltd
Beijing, China
  • Response Time: < 24h
  • Response Rate: 0%
Main Products: vacuum fitting
Overview
Model No.: EV-600 Brand: Super Q Place of Origin: China
Packing: carton+wooden box
Specifications

EV-series compound molecular pumps are composed of turbo molecular pumps and disk traction pumps. They have the characteristics of high pumping speed, high compression ratio, high pumping speed and high compression ratio at high pressure, and expand the application scope of molecular pumps.

The compound molecular pump has no selectivity and memory effect on the pumped gas. Because of its high compression ratio to the gas with large molecular weight, the pump can obtain clean high and ultra high vacuum without cold trap and oil baffle. It is widely used in various fields of electronics, metallurgy, chemical industry, scientific research and vacuum technology.

EV-series Technical Data

 

Model

EV-600

EV-600F

EV-1200

EV-1200F

EV-1600

EV-1600F

Inlet Flange (mm)

150 CF

160 ISO-K

200 CF

200 ISO-K

250 CF

250 ISO-K

Outlet Flange(mm)

40 KF

40 KF

50 KF

Pumping Speed(L/S)

600

1200

1600

Compression Ratio

N2

>109

>109

>109

H2

>8X103

>1X104

>1X104

Ultimate Vacuum(Pa)

<8X10-8

<5X10-7

<8X10-8

<5X10-7

<8X10-8

<5X10-7

Rotation Speed(rpm)

24000

24000

24000

Vibration

≤0.1 μm

0.1 μm

0.15 μm

Run-up Time(min)

<4.5

<5

<6

Backing Pump

4-8 L/S

8-15 L/S

15 L/S

Cooling Method

Water(air) cooling

Water(air) cooling

Water(air) cooling

Cooling Water Temperature  (℃)

≤20

20

20

Ambient Temperature(℃)

≤35

35

35

Cooling Water Flow quantity

1-2 L/min

1-2 L/min

1-2 L/min

Bake-out Temperature(℃)

<120

<120

<120

Heater Power(w)

<250

<300

<300

Heater Input Voltage(v)

AC220

AC220

AC220

Mounting

Vertical ±5°

Vertical  ±5°

Vertical ±5°

Weight(kg)

≈25

29

31


1.png

EV Series Installation Dimension Table of Composite Molecular Pump

3.png

Model

EV-600

EV-1200

EV-1600

Inlet Flange (mm)

150 CF

160 ISO-K

200 CF

200 ISO-K

250 CF

250 ISO-K

D1

Φ202

Φ180

Φ253

Φ240

Φ305

Φ290

D2

Φ212

Φ212

Φ237

Φ237

Φ274

Φ274

D3

Φ236

Φ236

Φ266

Φ266

Φ296

Φ296

D4

¨145.7

¨145.7

¨167.6

¨167.6

¨183.9

¨183.9

H1

375

375

405

405

393

393

H2

235

235

265

265

250

250

H3

238

238

265

265

250

250

H4

108

108

113

113

110

110

H5

4

4

19

19

16

16

L1

130

130

145

145

160

160

L2

137

137

152

152

176

176

Pump leg screw hole

4-M8

4-M8

4-M8

4-M8

4-M8

4-M8

Outlet Flange(mm)

KF40

KF40

KF40

KF40

KF50

KF50


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